JPH0545056B2 - - Google Patents

Info

Publication number
JPH0545056B2
JPH0545056B2 JP5720087A JP5720087A JPH0545056B2 JP H0545056 B2 JPH0545056 B2 JP H0545056B2 JP 5720087 A JP5720087 A JP 5720087A JP 5720087 A JP5720087 A JP 5720087A JP H0545056 B2 JPH0545056 B2 JP H0545056B2
Authority
JP
Japan
Prior art keywords
susceptor
heater
current
heated
resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP5720087A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63222427A (ja
Inventor
Fumitake Mieno
Juji Furumura
Masayuki Takeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP5720087A priority Critical patent/JPS63222427A/ja
Publication of JPS63222427A publication Critical patent/JPS63222427A/ja
Publication of JPH0545056B2 publication Critical patent/JPH0545056B2/ja
Granted legal-status Critical Current

Links

JP5720087A 1987-03-11 1987-03-11 高温処理炉 Granted JPS63222427A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5720087A JPS63222427A (ja) 1987-03-11 1987-03-11 高温処理炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5720087A JPS63222427A (ja) 1987-03-11 1987-03-11 高温処理炉

Publications (2)

Publication Number Publication Date
JPS63222427A JPS63222427A (ja) 1988-09-16
JPH0545056B2 true JPH0545056B2 (en]) 1993-07-08

Family

ID=13048851

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5720087A Granted JPS63222427A (ja) 1987-03-11 1987-03-11 高温処理炉

Country Status (1)

Country Link
JP (1) JPS63222427A (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2725081B2 (ja) * 1990-07-05 1998-03-09 富士通株式会社 半導体装置製造用熱処理装置
JPH0574725A (ja) * 1991-09-18 1993-03-26 Nec Yamagata Ltd 減圧式ｃｖｄ装置
JP2582012Y2 (ja) * 1991-12-10 1998-09-30 国際電気株式会社 ウェーハ加熱用ヒータ
JP6011130B2 (ja) * 2012-08-08 2016-10-19 株式会社リコー 電子写真用キャリアの製造方法

Also Published As

Publication number Publication date
JPS63222427A (ja) 1988-09-16

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees